Spectroscopic Ellipsometer
Sentech SE 800 E — www.sentech.de
Spectral range: 240-930nm.
Sample size: 6'', maximum substrate thickness 7mm.
Substrate: opaque or transparent.
Layers: Software allows for an unlimited number of layers to be analyzed.
Extinction Ratio: 10–6.
Measurement Spot: Manually variable beam diameter from 4 mm to 1 mm.
Goniometer: Mechanical Goniometer variable from 40° to 90°, set in 5° steps, accuracy better than 0.02°.
Data acquisition and analysis software: SpectraRay III.
Options: Film Thickness Probe FTPadvanced.