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Spectroscopic Ellipsometer - Sentech

Ellipsometer Sentech SE 800ESpectroscopic Ellipsometer

Sentech SE 800 E — www.sentech.de

Spectral range: 240-930nm.

Sample size: 6'', maximum substrate thickness 7mm.

Substrate: opaque or transparent.

Layers: Software allows for an unlimited number of layers to be analyzed.

Extinction Ratio: 10–6.

Measurement Spot: Manually variable beam diameter from 4 mm to 1 mm.

Goniometer: Mechanical Goniometer variable from 40° to 90°, set in 5° steps, accuracy better than 0.02°.

Data acquisition and analysis software: SpectraRay III.

Options: Film Thickness Probe FTPadvanced.

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