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Spectroscopic Ellipsometer - Sentech

Ellipsometer Sentech SE 800ESpectroscopic Ellipsometer


Sentech SE 800 E — www.sentech.de


Spectral range: 240-930nm.


Sample size: 6'', maximum substrate thickness 7mm.


Substrate: opaque or transparent.


Layers: Software allows for an unlimited number of layers to be analyzed.


Extinction Ratio: 10–6.


Measurement Spot: Manually variable beam diameter from 4 mm to 1 mm.


Goniometer: Mechanical Goniometer variable from 40° to 90°, set in 5° steps, accuracy better than 0.02°.


Data acquisition and analysis software: SpectraRay III.


Options: Film Thickness Probe FTPadvanced.

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